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278618-82-9 trisilane, 2-(dichloromethyl)-1,1,1,3,3,3-hexamethyl-2-(trimethylsilyl)-

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Product Name Trisilane, 2-(dichloromethyl)-1,1,1,3,3,3-hexamethyl-2-(trimethylsilyl)-
CAS No. 278618-82-9
Molecular Formula C10H28Cl2Si4