5181-42-0 trisilane, 2,2-dichloro-1,1,1,3,3,3-hexamethyl-

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Product Name	Trisilane, 2,2-dichloro-1,1,1,3,3,3-hexamethyl-
CAS No.	5181-42-0
Molecular Formula	C₆H₁₈Cl₂Si₃