| Product Name | Tris(dimethylamino)chlorosilane |
| CAS No. | 13307-05-6 |
| Synonyms | Trisdimethylaminochlorosilane; 1-chloro-N,N,N',N',N'',N''-hexamethylsilanetriamine |
| InChI | InChI=1/C6H18ClN3Si/c1-8(2)11(7,9(3)4)10(5)6/h1-6H3 |
| Molecular Formula | C6H18ClN3Si |
| Molecular Weight | 195.7657 |
| Density | 0.996g/cm3 |
| Boiling point | 173.2°C at 760 mmHg |
| Flash point | 58.6°C |
| Refractive index | 1.467 |
13307-05-6 tris(dimethylamino)chlorosilane
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